Reflection DHM® : R Series

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Reflection DHM : R Series

Reflection-configured digital holographic microscope

DHM® introduces innovative solutions for precise measurements in challenging dynamical environments and on complex samples.

Reflection DHMs enables to measure totally and partially reflecting objects. They can be use on most of the materials, silicon, metal, glass, polymer, non-diffusing ceramics, surface of soft material and liquid, among others, with reflectivity as small as 1%.

The DHM R systems are modular and offer ample space to place not only the samples, but also any components needed to interact with them, to monitor them, or control their environment.

DHM measurements can be performed in air, in liquid, in vacuum, or in gases environment, over a temperature range from cryogenic to thousands of degrees, and in any non-condensing humidity conditions.

Unique Applications

3D Interferometry

Measure your samples:

Scanning less, with high repeatability
In-situ: in vacuum, liquids, gas environments
Measure soft and liquid interfaces
Structured with oxide patterns
Non-static
In noisy environmental conditions

Example of applications

Standard certification, micro lenses, SiO₂ patterns, shape, roughness

Time-Resolved (4D) Interferometry

Measure 3D topographies at camera framerate, within extremely short acquisition time duration.

Measure the effect of mechanical forces, wears, optical, chemical or thermodynamical stimuli to your sample.
Characterize during manufacturing and optimize immediately your processes.

Example of applications

Liquid crystal elastomers, self-healing surfaces, smart polymers, additive manufacturing, …

MEMS Analysis

The optional stroboscopic unit synchronizes DHM® measurements with the excitation signal of a MEMS. With a single system:

Excite your MEMS
Record signals from your MEMS
Measure 3D topographies, vibration amplitude, speed, and acceleration along the MEMS period
Perform time and frequency modal analysis

Example of applications

Cantilevers, Microphones, SAW, Resonators, MUT, Micromirrors, Inertial devices, …

Large Area and Industrial Applications

High acquisition rate allows rapid routine inspections, automated industrial quality control as well as innovative R&D applications.

Inspect large areas
Screen and analyze large surfaces
Inspect on-line inspections at high throughput
Control on-flight on production lines

Example of applications

Signature recognition, siliconization of Syringes, micro-lens arrays, micro-mirrors, hip protheses, ...

The Principle of DHM® Technology

The core of DHM lies in its unique feature of acquiring information in a single camera capture, without any scanning, whether lateral, vertical, or phase. The instantaneous nature of this capture gives the systems their robustness against environmental disturbances, their ability to characterize fast temporal response of samples to external stimuli, to screen large areas, or to measure objects during their manufacturing, all with very high precision and repeatability.

Laser Metrology: DHM® defines vertical calibration directly by the laser wavelength rather than by mechanical displacement, ensuring high accuracy and reproducibility.
Interferometric Resolution: DHM® records the phase information to achieve sub-nanometric vertical precision, while lateral resolution depends on the selected microscope objective.
Digital Focalization: DHM® applies advanced numerical processing of holograms to obtain sharp focus either during or after measurement, eliminating the need for manual sample-height adjustment.
In-situ Measurement with Optimal Quality: DHM® uses an internal reference arm that is separate from the microscope objective, allowing free selection of objectives to ensure optimal image quality, including glass-corrected, immersion, high-NA, or ultra-long working distance lenses.

Digital Holographic Microscopy (DHM®) is a patented technology that records holograms on a camera. These holograms result from the interference between the beam reflected by the sample and a reference beam generated within the microscope. Each of the recorded holograms is processed numerically to retrieve the complex wavefront, containing both phase and intensity information, enabling to reconstruct a 3D optical map of the specimen.

Modes and Options

DHM Measurement Heads

R1000

Configured to operate with a single wavelength, this system is ideal for measuring smooth surfaces and vibrations.

R2100

Configured to operate with two wavelengths simultaneously, this system enables precise measurement of complex or discontinuous structures.

R2200

Configured to operate with a third light source, this system extends measurement capabilities of the R2100, particularly for transparent patterns and step structures. A maximum of two wavelengths can be measured simultaneously.

Objective Set

Three objective sets are available, each designed to meet diverse measurement needs with optimal optical quality. Unlike classical interferometers, the reference path in DHM® systems is not built-in to the microscope objective but integrated into the measurement head. This design allows DHM® to be used with a wide variety of objective types and to take full advantage of the multiple measurement possibilities offered by conventional objectives.

Standard

Configured for general-purpose use, this objective set includes long working distance, high numerical aperture (NA), and immersion objectives. It covers the widest range of applications in materials science and life sciences.

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Ultra Long Working Distance (ULWD)

Configured for applications requiring an exceptionally long working distance, this objective set is particularly suitable for high-magnification MEMS probing.

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Ultra High Numerical Aperture (UHNA)

Configured for applications that demand a large field of view, high acceptance angle, and high lateral resolution, this objective set is available in four magnifications (2.5×, 5×, 10×, and 20×). It is mainly used for rough samples and micro-optical components.

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Sample Stages

Motorized sample stages are designed to precisely focus the sample by adjusting its vertical (Z) position and to move it smoothly along the X and Y axes. They are essential for expanding the field of view by stitching multiple measurements together and for performing automated measurements over multiple sites, such as wafer inspections. The stages can be controlled either through a dedicated control window in the Koala acquisition and analysis software or via a joystick for greater ease of operation.

Manual