Park FX200
The most advanced AFM for 200 mm samples
Key Features
Superior FX Mechanical Design
Engineered for Low Mechanical Noise
- Optical microscope separated from the Z stage
- Robust Z stage with high-stiffness cross-roller guide and two bearing blocks
- Rock-solid wide trapezoidal strut
Constructed for Low Thermal Drift
- Low thermal expansion materials
- Real-time temperature sensor
FX Laser Beam Path
- A fiber-coupled laser (superluminescent diode; SLD) is attached to the optical microscope assembly
- Laser beam is focused through the objective lens
- Laser beam remains fixed at the center of the optical view
Key Features
User Convenience
Automatic Laser Beam Alignment
- The vision-guided alignment system detects the cantilever shape and position and then moves the optics XY stage to align the cantilever at the center of the field of view, precisely where the laser beam is focused.
- Two precision motors in the FX scan head adjust the steering mirror to align the laser beam in the center of the position-sensitive photodetector (PSPD).
Automatic Probe Exchange
- Up to 16 pre-aligned probe chip carriers with kinematic mounting points and probe information QR codes are stored on the automatic tip exchanger (ATX) module.
- After the ATX camera scans the probes' QR codes, the SmartScan™ AFM operating software displays probe information for each slot, allowing the user to change probes with a simple mouse click.
Sample Navigation & StepScan™
- Users can point and click on the sample view image to move the XY stage to the desired location, making it easy to locate areas of interest and return to the same spot, even for large samples such as a 200 mm wafer.
- With the StepScan™ function of SmartScan™ AFM operating software, users can select multiple points on the macro sample image, assign specific scan recipes to each location, and automatically carry out sequential measurements.
Park AFM Technology
Orthogonal Scan System
FX200 employs a flexure-guided design where the sample is scanned in the XY plane by a 2D flexure scanner, while the probe independently moves along the Z-axis with a separate 1D flexure scanner.
Equipped with low-noise optical sensors for XY feedback and an ultra-low-noise strain gauge sensor for Z control, this separated scanner system ensures highly orthogonal, linear scans with minimal out-of-plane motion and fast dynamic performance.
Park AFM Technology
True Non-Contact™ Mode
FX200 features True Non-contact™ mode, a proprietary technology exclusively offered by Park Systems.
True Non-contact mode measures the attractive force between the tip and sample surface, whereas tapping mode and contact mode use the repulsive force.
True Non-contact mode provides accurate sample topography while minimizing tip wear and sample damage.
Additional Features
Softwares
